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电容式MEMS器件微弱电容的检测装置
Date:2019-11-20 Hits:Affilication of Author(s):电子与信息工程学院
Patent Coverage:国内
School Sign:第一单位
Type of Patent:实用专利
Application Number:201220117420.4
Service Invention or Not:yes
Application Date:2012-03-27
Publication Date:2012-10-24
First Author:刘恒
Pre One:一种基于静电刚度的谐振式微加速度计
刘恒
169
Other Post:硕士研究生导师
Degree:Doctoral degree
School/Department:电子与信息工程学院
Business Address:信息科技大楼A座813-814室
Contact Information:ghost80boy@163.com