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一种双轴电容式微机械加速度计
Date:2019-11-20 Hits:Affilication of Author(s):电子与信息工程学院
Patent Coverage:国内
School Sign:第一单位
Type of Patent:实用专利
Application Number:201420857649.0
Service Invention or Not:yes
Application Date:2014-12-30
Publication Date:2015-04-29
First Author:刘恒
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