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一种硅微机械结构振动幅度的电学测量方法
Date:2019-11-20 Hits:Affilication of Author(s):电子与信息工程学院
Patent Coverage:国内
School Sign:第一单位
Type of Patent:发明专利
Application Number:201310210325.8
Service Invention or Not:yes
Application Date:2013-05-30
Publication Date:2013-09-11
First Author:刘恒
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