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Z轴电容式的微机械加速度计
Date:2019-11-20 Hits:Affilication of Author(s):电子与信息工程学院
Patent Coverage:国内
School Sign:第一单位
Type of Patent:发明专利
Application Number:201310667119.X
Service Invention or Not:yes
Application Date:2013-12-09
Publication Date:2014-03-26
First Author:刘恒
Pre One: 电容式微机械加速度计及其制造方法
Next One:电容式微机械加速度计
刘恒
Other Post:硕士研究生导师
Degree:Doctoral degree
School/Department:电子与信息工程学院
Business Address:信息科技大楼A座813-814室
Contact Information:ghost80boy@163.com