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电容式微机械加速度计及其制造方法

Date:2019-11-20 Hits:

Affilication of Author(s):电子与信息工程学院

Patent Coverage:国内

School Sign:第一单位

Type of Patent:发明专利

Application Number:201410380509.3

Service Invention or Not:yes

Application Date:2014-08-04

Publication Date:2014-11-19

First Author:刘恒

刘恒

Other Post:硕士研究生导师 Degree:Doctoral degree School/Department:电子与信息工程学院 Business Address:信息科技大楼A座813-814室 Contact Information:ghost80boy@163.com