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电容式微机械加速度计及其制造方法
Date:2019-11-20 Hits:Affilication of Author(s):电子与信息工程学院
Patent Coverage:国内
School Sign:第一单位
Type of Patent:发明专利
Application Number:201410380509.3
Service Invention or Not:yes
Application Date:2014-08-04
Publication Date:2014-11-19
First Author:刘恒
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